The MX63 and MX63L microscope systems are optimized for high-quality inspections of wafers as large as 300 mm. Compatible with flat panel displays, circuit boards, and other large samples, their modular designs enable you to choose the components you need to tailor the system to your application.
The MX63 and MX63L microscope systems are optimized for high-quality inspections of wafers as large as 300 mm, flat panel displays, circuit boards, and other large samples. Their modular design enables you to choose the components you need to tailor the system to your application.
These ergonomic and user-friendly microscopes help increase throughput while keeping inspectors comfortable while they do their work. Combined with PRECiV image analysis software, your entire workflow, from observation to report creation, can be simplified.
Functional
Designed to meet the ergonomic and safety requirements of the electronics industry with added functionality to enhance analysis capabilities.
User-Friendly
Simplified microscope settings makes it easier for users to make adjustments and reproduce system settings.
Advanced Imaging Technology
Our proven optics and exceptional imaging technology deliver clear images and reliable inspections.
Modular
Users can customize their system with the components that suit their application.
Application Image Gallery
Our advanced image management capability shows what you really want to observe.
| MX63 | MX63L | ||
| Optical system | UIS2 optical system (infinity-corrected system) | ||
| Microscope frame | Reflected light illumination | White LED(with Light Intensity Manager) 12 V 100 W halogen lamp, 100W mercury lamp, light guide source Brightfield/darkfield/mirror cube manual changeover. (Mirror cube is optional.) 3 position coded mirror units changed by manual operation Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically full open for darkfield) Observation mode: brightfield, darkfield, differential interface contrast (DIC)*1, simple polarizing*1, fluorescence*1, IR and MIX observation(4 directional darkfield)*2 *1 Optional mirror cube, *2 MIX observation configuration is required | |
| Transmitted light illumination | Transmitted light illumination unit: MX-TILLA or MX-TILLB is required. - MX-TILLA: a condenser (NA 0.5) and an aperture stop - MX-TILLB: a condenser (NA 0.6), an aperture stop and a field stop Light source: LG-LSLED (LED light source) Light guide: LG-SF Observation mode: brightfield, simple polarizing | ||
| Focus | Stroke: 32 mm Fine stroke per rotation: 100 μm Minimum graduation: 1μm Upper limit stopper and torque adjustment for coarse handle | ||
| Maximum load weight (including stage and holder) | 8 kg | 15 kg | |
| Observation tube | Wide-field (FN 22 mm) | Erect and trinocular: U-ETR4 Erect, tilting and trinocular: U-TTR-2 Inverted and trinocular: U-TR30-2, U-TR30IR (for IR observation) Inverted and binocular: U-BI30-2 Inverted, tilting and binocular: U-TBI30 | |
| Super-wide-field (FN 26.5 mm) | Erect, tilting and trinocular: MX-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 0 : 100%) Erect, tilting and trinocular: U-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 20% : 80%) Inverted and trinocular: U-SWTR-3 | ||
| Motorized nosepiece | Brightfield Motorized sextuple with a slider slot for DIC: U-D6REMC Motorized centerable quintuple with a slider slot for DIC: U-P5REMC Brightfield and darkfield Motorized sextuple with a slider slot for DIC: U-D6BDREMC Motorized quintuple with a slider slot for DIC: U-D5BDREMC Motorized centerable quintuple with a slider slot for DIC: U-P5BDREMC Motorized with vacuum：U-D5BDREMC-VA | ||
| Stage (X × Y) | Coaxial right handle with built-in clutch drive: MX-SIC8R Stroke: 210 x 210 mm Transmitted light illumination area: 189 x 189 mm Coaxial right handle with built-in clutch drive: MX-SIC6R2 Stroke: 158 x 158 mm (Reflected light use only) | Coaxial right handle with built-in clutch drive: MX-SIC1412R2 Stroke: 356 x 305 mm Transmitted light illumination area: 356 x 284 mm | |
| Weight | Approx. 35.6kg（Microscope frame 26kg） | Approx. 44kg（Microscope frame 28.5kg） | |
